Patents/Inventors

Simon Reinald Huisman

EindhovenNL14 patents

13 Patents

US125911842026
Enhanced Alignment for a Photolithographic Apparatus
ASML Netherlands B.V.
0 cites
US125851982026
Lithographic Apparatus, Multi-wavelength Phase-modulated Scanning Metrology System and Method
ASML HOLDING N.V.
0 cites
US125852012026
Metrology Mark Structure and Method of Determining Metrology Mark Structure
ASML NETHERLANDS B.V.
0 cites
US125720832026
Intensity Order Difference Based Metrology System, Lithographic Apparatus, and Methods Thereof
ASML HOLDING N.V.
0 cites
US123266692025
Illumination Apparatus and Associated Metrology and Lithographic Apparatuses
ASML Netherlands B.V.
0 cites
US122822632025
Metrology System and Lithographic System
ASML NETHERLANDS B.V.
0 cites
US121241772024
Overlay Measurement System Using Lock-in Amplifier Technique
ASML Netherlands B.V.
0 cites
US120259252024
Metrology Method and Lithographic Apparatuses
ASML Netherlands B.V.
0 cites
US119069062024
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML Netherlands B.V.
0 cites
US118156752023
Metrology Device and Phase Modulator Apparatus Therefor Comprising a First Moving Grating and a First Compensatory Grating Element
ASML Netherlands B.V.
0 cites
US118031302023
Phase Modulators in Alignment to Decrease Mark Size
ASML Holding N.V.
0 cites
US117623052023
Alignment Method
ASML Netherlands B.V.
0 cites
US115560682023
Detection System for an Alignment Sensor
ASML Netherlands B.V.
0 cites