Patents/Inventors

Simon Gijsbert Josephus Mathijssen

RosmalenNL8 patents

11 Patents

US124746422025
Metrology Method for Measuring an Etched Trench and Associated Metrology Apparatus
ASML Netherlands B.V.
0 cites
US124746472025
Generating an Alignment Signal Based on Local Alignment Mark Distortions
ASML HOLDING N.V.
0 cites
US124364702025
Substrate Comprising a Target Arrangement, and Associated at Least One Patterning Device, Lithographic Method and Metrology Method
ASML Netherlands B.V.
0 cites
US121893052025
Metrology Method and Apparatus and Computer Program
ASML Netherlands B.V.
0 cites
US121893142025
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML NETHERLANDS B.V.
0 cites
US121584352024
Illumination and Detection Apparatus for a Metrology Apparatus
ASML NETHERLANDS B.V.
0 cites
US121302462024
Method for Overlay Metrology and Apparatus Thereof
ASML Netherlands B.V.
0 cites
US120614212024
Method and System for Determining Information About a Target Structure
ASML Netherlands B.V.
0 cites
US120322992024
Metrology Method and Associated Metrology and Lithographic Apparatuses
ASML NETHERLANDS B.V.
0 cites
US120136472024
Metrology Method
ASML NETHERLANDS B.V.
0 cites
US118861252024
Method for Inferring a Local Uniformity Metric
ASML NETHERLANDS B. V.
0 cites