2 Patents
- US117441582023Ferroelectric Material, MEMS Component Comprising a Ferroelectric Material, MEMS Device Comprising a First MEMS Component, Method of Producing a MEMS Component, and Method of Producing a Cmos-compatible MEMS Component
Christian-albrechts-universitaet Zu Kiel
0 cites - US116721272023Ferroelectric Semiconductor Device and Method for Producing a Memory Cell
Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.
0 cites