5 Patents
- US121911182025Monolithic Modular Microwave Source with Integrated Process Gas Distribution
Applied Materials, Inc.
0 cites - US121440902024Monolithic Modular Microwave Source with Integrated Temperature Control
Applied Materials, Inc.
0 cites - 0 cites
- US118813842024Monolithic Modular Microwave Source with Integrated Process Gas Distribution
Applied Materials, Inc.
0 cites - US115642922023Monolithic Modular Microwave Source with Integrated Temperature Control
Applied Materials, Inc.
0 cites