Patents/Inventors

Silke Hamm

LaupheimDE3 patents

4 Patents

US124420782025
Workpiece Processing Apparatus with Gas Showerhead Assembly
Mattson Technology, Inc.
0 cites
US123621942025
Rapid Thermal Processing System with Cooling System
Matson Technology, Inc.
0 cites
US121762412024
Support Structure for Thermal Processing Systems
Matson Technology, Inc.
0 cites
US120681772024
Rapid Thermal Processing System with Cooling System
Mattson Technology, Inc.
0 cites