Patents/Inventors

Si-han Zeng

EindhovenNL1 patent

2 Patents

US117969782023
Method for Determining Root Causes of Events of a Semiconductor Manufacturing Process and for Monitoring a Semiconductor Manufacturing Process
ASML NETHERLANDS B.V.
0 cites
US117748692023
Method and System for Determining Overlay
ASML NETHERLANDS B.V.
0 cites