Shurong Liang

5 Patents

• US124630452025

  Selective Trench Modification Using Directional Etch

  Applied Materials, Inc.

  0 cites
• US123879422025

  Modifying Patterned Features Using a Directional Etch

  Applied Materials, Inc.

  0 cites
• US119843182024

  Directional Modification of Patterning Structure to Enhance Pattern Elongation Process Margin

  Applied Materials, Inc.

  0 cites
• US118548182023

  Angled Etch for Surface Smoothing

  Applied Materials, Inc.

  0 cites
• US118429232023

  Methods for Forming Elongated Contact Hole Ends

  Applied Materials, Inc.

  0 cites