Patents/Inventors

Shunsuke Mikuriya

TokyoJP2 patents

2 Patents

US125687842026
Method of Polishing Carrier Plate, Carrier Plate, and Method of Polishing Semiconductor Wafer
SUMCO CORPORATION
0 cites
US117722312023
Double-sided Wafer Polishing Method
SUMCO CORPORATION
0 cites