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Inventors
Shunichi Motomura
Tokyo
JP
2 patents
3 Patents
US12119202
2024
Mechanism for Adjusting Angle of Incidence on Charged Particle Beam Aperture, and Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US11817289
2023
Charged Particle Beam Device
Japan Fine Ceramics Center
0 cites
US11798776
2023
Charged Particle Beam Apparatus
Hitachi High-tech Corporation
0 cites