Patents/Inventors

Shun Matsui

ToyamaJP14 patents

9 Patents

US126222122026
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-transitory Computer-readable Recording Medium
Kokusai Electric Corporation
0 cites
US125675712026
Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US124574082025
Image Processing Apparatus, Control Method, and Storage Medium
CANON KABUSHIKI KAISHA
0 cites
US123920322025
Substrate Processing Apparatus with Cleaning of Exhaust System
KOKUSAI ELECTRIC CORPORATION
0 cites
US121658942024
Processing Method, Method of Manufacturing Semiconductor, and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US120930212024
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
Kokusai Electric Corporation
0 cites
US118916972024
Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US117495502023
Method of Manufacturing Semiconductor Device by Setting Process Chamber Maintenance Enable State
KOKUSAI ELECTRIC CORPORATION
0 cites
US117477892023
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites