Patents/Inventors

Shuji Uozumi

TokyoJP6 patents

6 Patents

US124726012025
Method of Checking Leakage of Fluid and Polishing Apparatus
EBARA CORPORATION
0 cites
US123680592025
Substrate Cleaning Apparatus, Substrate Processing Apparatus, Substrate Cleaning Method, Device Manufacturing Method, and Non-transitory Computer Readable Medium
EBARA CORPORATION
0 cites
US121813452024
Method of Calibrating Radiation Thermometer and System Thereof
EBARA CORPORATION
0 cites
US119929152024
System for Adjusting Pad Surface Temperature and Polishing Apparatus
EBARA CORPORATION
0 cites
US118268712023
Pad-temperature Regulating Apparatus, Pad-temperature Regulating Method, and Polishing Apparatus
EBARA CORPORATION
0 cites
US116181112023
Method of Manufacturing Plate-shaped Solder and Manufacturing Device
Mitsubishi Electric Corporation
0 cites