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Inventors
Shuichiro Motoyama
Nagoya
JP
7 patents
8 Patents
US12349241
2025
Ceramic Heater and Method of Manufacturing the Same
NGK INSULATORS, Ltd.
0 cites
US12267919
2025
Ceramic Heater and Method of Manufacturing the Same
NGK INSULATORS, Ltd.
0 cites
US12144067
2024
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US11984329
2024
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US11963269
2024
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US11924929
2024
Ceramic Heater and Thermocouple Guide
NGK INSULATORS, Ltd.
0 cites
US11602012
2023
Wafer Placement Table and Method for Manufacturing the Same
NGK Insulators, Ltd.
0 cites
US11574822
2023
Wafer Support Table with Ceramic Substrate Including Core and Surface Layer
NGK Insulators, Ltd.
0 cites