Patents/Inventors

Shuhei Yamabe

MiyagiJP4 patents

4 Patents

US119843002024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119786142024
Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US118697502024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117156302023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites