Patents/Inventors

Shuhei Shigaki

ToyamaJP5 patents

5 Patents

US125851882026
Composition for Forming Resist Underlying Film
NISSAN CHEMICAL CORPORATION
0 cites
US124932432025
Film-forming Composition
NISSAN CHEMICAL CORPORATION
0 cites
US123728752025
Composition for Resist Pattern Metallization Process
NISSAN CHEMICAL CORPORATION
0 cites
US120845922024
Coating Composition for Pattern Inversion
NISSAN CHEMICAL CORPORATION
0 cites
US116094992023
Silicon-containing Coating Agent for Pattern Reversal
NISSAN CHEMICAL CORPORATION
0 cites