Patents/Inventors

Shuhei Saido

ToyamaJP6 patents

6 Patents

US125403882026
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US123449352025
Substrate Processing Apparatus, Heat Insulator Assembly and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US122411592025
Substrate Processing Apparatus and Ceiling Heater
Kokusai Electric Corporation
0 cites
US120538052024
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US119675012024
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
Kokusai Electric Corporation
0 cites
US116859922023
Substrate Processing Apparatus, Quartz Reaction Tube and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites