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Inventors
Shuhei Onishi
Kyoto
JP
1 patent
2 Patents
US12412761
2025
Method of Controlling the Patterned Wafer Process Temperature Using the Contact Type Thermometer in the Front Side of a Dummy Substrate to Accurately Measure Emissivity in Order to Perform Temperature Measurement Using Radiation Thermometer
SCREEN Holdings Co., Ltd.
0 cites
US11761911
2023
Phantom for Evaluating CT Device
Shimadzu Corporation
0 cites