Patents/Inventors

Shu-yen Wang

TaipeiTW7 patents

8 Patents

US126057472026
Wafer Wet Cleaning System
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US124826752025
Systems and Methods for In-situ Marangoni Cleaning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121620452024
Wafer Wet Cleaning System
Tawain Semiconductor Manufacturing Co., Ltd.
0 cites
US120805672024
Systems and Methods for In-situ Marangoni Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119273922024
Wafer Drying System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US119232102024
Systems and Methods for In-situ Marangoni Cleaning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US117421962023
Systems and Methods for Metallic Deionization
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US115811992023
Wafer Drying System
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites