Patents/Inventors

Shu Satoh

Byfield, MAUS3 patents

3 Patents

US124630032025
High Temperature Ion Source
Axcelis Technologies, Inc.
0 cites
US124313322025
High Energy Implanter with Small Footprint
Axcelis Technologies, Inc.
0 cites
US119231692024
Apparatus and Method for Metal Contamination Control in an Ion Implantation System Using Charge Stripping Mechanism
Axcelis Technologies, Inc.
0 cites