Patents/Inventors

Shu-kwan Lau

Sunnyvale, CAUS22 patents

18 Patents

US125936432026
Batch Thermal Process Chamber
Applied Materials, Inc.
0 cites
US125842402026
Low Mass Substrate Support
Applied Materials, Inc.
0 cites
US125711012026
Multi-level Injector with Angled Gas Outlet for Semiconductor Epitaxy Growth
APPLIED MATERIALS, Inc.
0 cites
US125753672026
Susceptor Transfer for Process Chamber
Applied Materials, Inc.
0 cites
US125404002026
Multi-flow Gas Circuits, Processing Chambers, and Related Apparatus and Methods for Semiconductor Manufacturing
APPLIED MATERIALS, Inc.
0 cites
US124928672025
Air Shrouds with Integrated Heat Exchanger
Applied Materials, Inc.
0 cites
US124933072025
Fast Switching Gas Circuits and Processing Chambers, and Related Methods and Apparatus, for Gas Stabilization
Applied Materials, Inc.
0 cites
US124671442025
Methods of Correlating Zones of Processing Chambers, and Related Systems and Methods
APPLIED MATERIALS, Inc.
0 cites
US124493092025
Methods for Detection Using Optical Emission Spectroscopy
Applied Materials, Inc.
0 cites
US124287312025
Flow Guide Structures and Heat Shield Structures, and Related Methods, for Deposition Uniformity and Process Adjustability
APPLIED MATERIALS, Inc.
0 cites
US124287532025
Lift Assemblies, and Related Methods and Components, for Substrate Processing Chambers
APPLIED MATERIALS, Inc.
0 cites
US123240612025
Epitaxial Deposition Chamber
Applied Materials, Inc.
0 cites
US121966172025
Temperature Profile Measurement and Synchronized Control on Substrate and Susceptor in an Epitaxy Chamber
Applied Materials, Inc.
0 cites
US121881482025
Multi-layer EPI Chamber Body
Applied Materials, Inc.
0 cites
US121632292024
Multi Zone Spot Heating in EPI
Applied Materials, Inc.
0 cites
US121659342024
Substrate Processing Monitoring
Applied Materials, Inc.
0 cites
US118210882023
Multi Zone Spot Heating in EPI
Applied Materials, Inc.
0 cites
US118079312023
Chamber Injector
Applied Materials, Inc.
0 cites