Patents/Inventors

Shu-kwan Danny Lau

Sunnyvale, CAUS4 patents

5 Patents

US122610622025
Spot Heating by Moving a Beam with Horizontal Rotary Motion
Applied Materials, Inc.
0 cites
US120377012024
Multi-thermal CVD Chambers with Shared Gas Delivery and Exhaust System
Applied Materials, Inc.
0 cites
US120338742024
EPI Chamber with Full Wafer Laser Heating
Applied Materials, Inc.
0 cites
US118429072023
Spot Heating by Moving a Beam with Horizontal Rotary Motion
APPLIED MATERIALS, Inc.
0 cites
US116803382023
Linear Lamp Array for Improved Thermal Uniformity and Profile Control
APPLIED MATERIALS, Inc.
0 cites