Patents/Inventors

Shouqian Shao

Fremont, CAUS3 patents

4 Patents

US123945952025
Multi-antenna Unit for Large Area Inductively Coupled Plasma Processing Apparatus
Applied Materials, Inc.
0 cites
US120805162024
High Density Plasma Enhanced Process Chamber
APPLIED MATERIALS, Inc.
0 cites
US119675162024
Substrate Support for Chucking of Mask for Deposition Processes
Applied Materials, Inc.
0 cites
US119292362024
Methods of Tuning to Improve Plasma Stability
APPLIED MATERIALS, Inc.
0 cites