Patents/Inventors

Shou-sung Chang

Mountain View, CAUS31 patents

31 Patents

US125337712026
Polishing Slurry Dispense Nozzle
Applied Materials, Inc.
0 cites
US125281512026
Gas Entrainment During Jetting of Fluid for Temperature Control in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US124726042025
Grounding Techniques for ESD Polymeric Fluid Lines
Applied Materials, Inc.
0 cites
US124590112025
Steam Treatment Stations for Chemical Mechanical Polishing System
Applied Materials, Inc.
0 cites
US124590782025
In-situ Conditioner Disk Cleaning During CMP
Applied Materials, Inc.
0 cites
US124343472025
Method for CMP Temperature Control
Applied Materials, Inc.
0 cites
US123924272025
Insulated Fluid Lines in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US123188822025
Apparatus and Method for CMP Temperature Control
Applied Materials, Inc.
0 cites
US122964272025
Apparatus and Method for CMP Temperature Control
Applied Materials, Inc.
0 cites
US122908962025
Apparatus and Method for CMP Temperature Control
Applied Materials, Inc.
0 cites
US122908972025
Fluid-tight Electrical Connection Techniques for Semiconductor Processing
Applied Materials, Inc.
0 cites
US122144682025
Temperature Control of Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US121069762024
Steam-assisted Single Substrate Cleaning Process and Apparatus
Applied Materials, Inc.
0 cites
US120300932024
Steam Treatment Stations for Chemical Mechanical Polishing System
Applied Materials, Inc.
0 cites
US119869262024
Slurry Distribution Device for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US119191232024
Apparatus and Method for CMP Temperature Control
Applied Materials, Inc.
0 cites
US118970792024
Low-temperature Metal CMP for Minimizing Dishing and Corrosion, and Improving Pad Asperity
Applied Materials, Inc.
0 cites
US118656712024
Temperature-based In-situ Edge Assymetry Correction During CMP
Applied Materials, Inc.
0 cites
US118336372023
Control of Steam Generation for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US118268722023
Temperature and Slurry Flow Rate Control in CMP
Applied Materials, Inc.
0 cites
US118199762023
Spray System for Slurry Reduction During Chemical Mechanical Polishing (cmp)
Applied Materials, Inc.
0 cites
US118068352023
Slurry Distribution Device for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US118015822023
Control of Steam Generation for Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US117800462023
Polishing System with Annular Platen or Polishing Pad
Applied Materials, Inc.
0 cites
US117525892023
Chemical Mechanical Polishing Temperature Scanning Apparatus for Temperature Control
Applied Materials, Inc.
0 cites
US117281852023
Steam-assisted Single Substrate Cleaning Process and Apparatus
Applied Materials, Inc.
0 cites
US116971872023
Temperature-based Assymetry Correction During CMP and Nozzle for Media Dispensing
Applied Materials, Inc.
0 cites
US116338332023
Use of Steam for Pre-heating of CMP Components
Applied Materials, Inc.
0 cites
US116284782023
Steam Cleaning of CMP Components
Applied Materials, Inc.
0 cites
US115970522023
Temperature Control of Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites
US115773582023
Gas Entrainment During Jetting of Fluid for Temperature Control in Chemical Mechanical Polishing
Applied Materials, Inc.
0 cites