Patents/Inventors

Shota Umeda

TokyoJP3 patents

4 Patents

US124445912025
Diagnosis Device, Diagnosis Method, Plasma Processing Apparatus, and Semiconductor Device Manufacturing System
Hitachi High-tech Corporation
0 cites
US123879212025
Apparatus Diagnostic Apparatus, Apparatus Diagnostic Method, Plasma Processing Apparatus and Semiconductor Device Manufacturing System
HITACHI HIGH-TECH CORPORATION
0 cites
US120401672024
Diagnosis Apparatus, Plasma Processing Apparatus and Diagnosis Method
HITACHI HIGH-TECH CORPORATION
0 cites
US120149092024
Plasma Processing Apparatus and Plasma Processing System
HITACHI HIGH-TECH CORPORATION
0 cites