Patents/Inventors

Shota Sambonsuge

ChibaJP3 patents

4 Patents

US123157172025
Method for Manufacturing Metal Oxynitride Film
Semiconductor Energy Laboratory Co., Ltd.
0 cites
US117281632023
Method for Manufacturing Metal Oxynitride Film
Semiconductor Energy Laboratory Co., Ltd.
0 cites
US116161492023
Semiconductor Device and Method for Manufacturing Semiconductor Device
Semiconductor Energy Laboratory Co., Ltd.
0 cites
US116109972023
Semiconductor Material and Semiconductor Device Having a Metal Element and Nitrogen
Semiconductor Energy Laboratory Co., Ltd.
0 cites