Patents/Inventors

Shota Ezaki

MiyagiJP5 patents

6 Patents

US126147032026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123548902025
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US121486362024
Substrate Support
TOKYO ELECTRON LIMITED
0 cites
US117911772023
Placing Table Including Heat Exchange Medium Path and Substrate Processing Apparatus Thereof
TOKYO ELECTRON LIMITED
0 cites
US117840662023
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117354442023
Stage and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites