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Inventors
Shoji Iiyama
Yamaguchi
JP
3 patents
4 Patents
US12441620
2025
Method for Producing Trichlorosilane and Method for Producing Polycrystalline Silicon Rod
Tokuyama Corporation
0 cites
US12404172
2025
Hydrogen Chloride Dehydration Method
TOKUYAMA CORPORATION
0 cites
US12221352
2025
Chlorosilane Producing Method
Tokuyama Corporation
0 cites
US12162763
2024
Method for Producing Purified Chlorosilanes
Tokuyama Corporation
0 cites