Patents/Inventors

Shoichiro Matsuyama

MiyagiJP5 patents

6 Patents

US123946072025
Attracting Method
Tokyo Electron Limited
0 cites
US121256792024
Plasma Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites
US120464572024
Electrostatic Chuck, Focus Ring, Support Base, Plasma Processing Apparatus, and Plasma Processing Method
Tokyo Electron Limited
0 cites
US118307512023
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US117640382023
Plasma Processing Apparatus, Electrostatic Attraction Method, and Electrostatic Attraction Program
TOKYO ELECTRON LIMITED
0 cites
US117281442023
Edge Ring and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites