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Inventors
Shohei Takeda
Tokyo
JP
5 patents
5 Patents
US12576462
2026
Method of Processing Plate-shaped Workpiece
DISCO CORPORATION
0 cites
US12394658
2025
Method of Processing Plate-shaped Workpiece
DISCO CORPORATION
0 cites
US12203913
2025
Odor Detection System, Odor Detection Method, and Program
I-PEX Inc.
0 cites
US12205129
2025
Information Management System, Information Management Method, and Program
I-PEX Inc.
0 cites
US11881418
2024
Wafer Cleaning Apparatus
DISCO CORPORATION
0 cites