Patents/Inventors

Shohei Mimura

JoetsuJP2 patents

3 Patents

US121971212025
Phase Shift Mask Blank, Manufacturing Method of Phase Shift Mask, and Phase Shift Mask
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US121817902024
Reflective Mask Blank and Reflective Mask
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US120503962024
Reflective Mask Blank, Method of Manufacturing Thereof, and Reflective Mask
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites