Patents/Inventors

Shogo Otani

ToyamaJP2 patents

3 Patents

US124068432025
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US118238862023
Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US117281592023
Method of Manufacturing Semiconductor Device, Surface Treatment Method, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites