Patents/Inventors

Shiyu Yue

Santa Clara, CAUS5 patents

5 Patents

US125688042026
Method of In-situ Selective Metal Removal via Gradient Oxidation for Gapfill
Applied Materials, Inc.
0 cites
US124068842025
Self Field-suppression CVD Tungsten (W) Fill on PVD W Liner
APPLIED MATERIALS, Inc.
0 cites
US123946192025
Metal Oxide Preclean for Bottom-up Gapfill in MEOL and BEOL
APPLIED MATERIALS, Inc.
0 cites
US123745682025
One Chamber Multi-station Selective Metal Removal
APPLIED MATERIALS, Inc.
0 cites
US121128902024
Top Magnets for Decreased Non-uniformity in PVD
Applied Materials, Inc.
0 cites