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Shiva K.T. Rajavelu Muralidhar
Tempe, AZ
US
3 patents
2 Patents
US12584857
2026
Method and Apparatus for Transmittance Measurements of Large Articles
ASM IP Holding B.V.
0 cites
US12544727
2026
Process Chamber with Side Support
ASM IP Holding B.V.
0 cites