Patents/Inventors

Shinya Ueda

HachiojiJP9 patents

8 Patents

US125506442026
Method and System for Forming Silicon Nitride on a Sidewall of a Feature
ASM IP Holding B.V.
0 cites
US124313542025
Silicon Nitride and Silicon Oxide Deposition Methods Using Fluorine Inhibitor
ASM IP Holding B.V.
0 cites
US123920382025
Thin-film Deposition Method and System
ASM IP Holding B.V.
0 cites
US122834792025
Substrate Processing Method
ASM IP Holding B.V.
0 cites
US122147412025
Gas Generator
NIPPON KAYAKU KABUSHIKI KAISHA
0 cites
US118898202024
Position Information Transmission Device, Position Information Transmission Method, and Program
SHARP NEC DISPLAY SOLUTIONS, Ltd.
0 cites
US116768122023
Method for Forming Silicon Nitride Film Selectively on Top/bottom Portions
ASM IP Holding B.V.
0 cites
US116672612023
Gas Generator
NIPPON KAYAKU KABUSHIKI KAISHA
0 cites