Patents/Inventors

Shinya Okano

YamanashiJP7 patents

7 Patents

US124313722025
Heating Device, Substrate Processing System, and Heating Method
Tokyo Electron Limited
0 cites
US123879542025
Teaching Method for Transfer Device, and Transfer System
TOKYO ELECTRON LIMITED
0 cites
US123622152025
Apparatus for Transferring Substrate and Method for Transferring Substrate
Tokyo Electron Limited
0 cites
US122781222025
Heating Device and Heating Method
Tokyo Electron Limited
0 cites
US122565032025
Electronic Device
Semiconductor Energy Laboratory Co., Ltd.
0 cites
US121702162024
Transfer Device, Processing System, and Transfer Method
Tokyo Electron Limited
0 cites
US116720862023
Electronic Device
SEMICONDUCTOR ENERGY LABORATORY CO., Ltd.
0 cites