Patents/Inventors

Shinya Morikita

MiyagiJP10 patents

10 Patents

US125753512026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124889902025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124566262025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124008652025
Pulsed Capacitively Coupled Plasma Processes
Tokyo Electron Limited
0 cites
US123476452025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123082082025
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117281762023
Treatment Method
Tokyo Electron Limited
0 cites
US115943982023
Apparatus and Method for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US115690942023
Etching Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US115453642023
Pulsed Capacitively Coupled Plasma Processes
Tokyo Electron Limited
0 cites