Patents/Inventors

Shinya Iwashita

HelsinkiFI7 patents

8 Patents

US124045832025
Transition Metal Nitride Deposition Method
ASM IP Holding B.V.
0 cites
US124068812025
Methods and Systems for Filling a Gap
ASM IP Holding B.V.
0 cites
US123621432025
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US122179542025
Method of Cleaning a Surface
ASM IP Holding B.V.
0 cites
US120273442024
Film Forming Apparatus
Tokyo Electron Limited
0 cites
US118850142024
Transition Metal Nitride Deposition Method
ASM IP Holding B.V.
0 cites
US118548762023
Systems and Methods for Cobalt Metalization
ASM IP Holding B.V.
0 cites
US116580082023
Film Forming Apparatus and Film Forming Method
Tokyo Electron Limited
0 cites