Shinya Ebata

5 Patents

• US125403882026

  Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  Kokusai Electric Corporation

  0 cites
• US123659872025

  Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US121397872024

  Apparatus and Method for Cleaning Reaction Vessel for Processing Substrate

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US120538052024

  Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US115916942023

  Method of Manufacturing Semiconductor Device, Method of Processing Substrate, Substrate Processing Apparatus, and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites