Patents/Inventors

Shinsuke Oka

MiyagiJP13 patents

13 Patents

US123004692025
Plasma Processing Apparatus, Calculation Method, and Calculation Program
Tokyo Electron Limited
0 cites
US122781262025
Plasma Processing Apparatus, Thermal Resistance Acquisition Method, and Thermal Resistance Acquisition Program
TOKYO ELECTRON LIMITED
0 cites
US122437282025
Substrate Holding Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US121424622024
Method of Reducing Leakage of Heat Transfer Gas and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US120875592024
Plasma Processing Apparatus, Temperature Control Method, and Temperature Control Program
TOKYO ELECTRON LIMITED
0 cites
US120637172024
Plasma Processing Apparatus, and Temperature Control Method
TOKYO ELECTRON LIMITED
0 cites
US120273492024
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US119357312024
Plasma Processing Apparatus, Plasma State Detection Method, and Plasma State Detection Program
TOKYO ELECTRON LIMITED
0 cites
US118624382024
Plasma Processing Apparatus, Calculation Method, and Calculation Program
TOKYO ELECTRON LIMITED
0 cites
US116211772023
Plasma Processing Apparatus and Calculation Method
TOKYO ELECTRON LIMITED
0 cites
US115943992023
Cleaning Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US115574682023
Plasma Processing Apparatus, Temperature Control Method, and Temperature Control Program
TOKYO ELECTRON LIMITED
0 cites
US115469702023
Plasma Processing Apparatus and Temperature Control Method
TOKYO ELECTRON LIMITED
0 cites