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Inventors
Shinsuke Kimura
Mie-ken
JP
1 patent
2 Patents
US11921428
2024
Substrate Processing Method and Substrate Processing Apparatus
Kioxia Corporation
0 cites
US11828291
2023
Motor Device, Controller, Motor System, Fan Unit, and Communication Method
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites