Patents/Inventors

Shinobu Sugiura

ToyamaJP2 patents

3 Patents

US122939302025
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Heater
Kokusai Electric Corporation
0 cites
US120853382024
Heater, Temperature Control System, and Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites
USD09801772023
Ceiling Heater for Substrate Processing Apparatus
KOKUSAI ELECTRIC CORPORATION
0 cites