Shinjiro Watanabe

3 Patents

• US123725732025

  Method for Setting Up Test Apparatus and Test Apparatus

  Tokyo Electron Limited

  0 cites
• US122535592025

  Alignment Method and Inspection Apparatus

  Tokyo Electron Limited

  0 cites
• US117156572023

  Substrate Misalignment Detection Method, Substrate Position Abnormality Determination Method, Substrate Transfer Control Method, and Substrate Misalignment Detection Device

  TOKYO ELECTRON LIMITED

  0 cites