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Inventors
Shinji Takikawa
Anjo
JP
3 patents
4 Patents
US12154764
2024
Gas Supply Determination Method and Plasma Generator
FUJI CORPORATION
0 cites
US11984732
2024
Contactless Electric Power Supply Device
FUJI CORPORATION
0 cites
US11929237
2024
Plasma Generation Device and Plasma Head Cooling Method
FUJI CORPORATION
0 cites
US11632851
2023
Plasma Exposure Device
FUJI CORPORATION
0 cites