Patents/Inventors

Shinji Orimoto

YamanashiJP2 patents

3 Patents

US123920262025
Method and Device for Substrate Processing
Tokyo Electron Limited
0 cites
US123946562025
Mounting Table and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US116055472023
Temperature Measuring Mechanism, Temperature Measuring Method, and Stage Device
TOKYO ELECTRON LIMITED
0 cites