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Inventors
Shinji Kubota
Ina
JP
12 patents
12 Patents
US12563164
2026
Projection Method and Non-transitory Computer-readable Storage Medium Storing Program
SEIKO EPSON CORPORATION
0 cites
US12165842
2024
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US12033832
2024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11898840
2024
Measuring Device and Method of Obtaining Thickness of Sheath
TOKYO ELECTRON LIMITED
0 cites
US11871503
2024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11791135
2023
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US11764082
2023
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11742181
2023
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11742182
2023
Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11631572
2023
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US11601628
2023
Control Method of Spectroscopic Imaging Device, Spectroscopic Imaging Device, Computer Program, Control Method of Display System, Control Method of Projector, Display System, and Projector
SEIKO EPSON CORPORATION
0 cites
US11581170
2023
Plasma Processing Apparatus and Processing Method
TOKYO ELECTRON LIMITED
0 cites