Patents/Inventors

Shinji Himori

MiyagiJP6 patents

7 Patents

US125371682026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125371722026
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US124379702025
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124244242025
Plasma Monitoring System, Plasma Monitoring Method, and Monitoring Device
Tokyo Electron Limited
0 cites
US122550492025
Plasma Processing Apparatus and Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US120338322024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117640342023
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites