Patents/Inventors

Shinichiro Koga

TochigiJP1 patent

2 Patents

US121481812024
Measurement Apparatus That Measures Position Information of Measurement Target in Predetermined Direction
CANON KABUSHIKI KAISHA
0 cites
US117210132023
Information Processing Apparatus, Determination Method, Imprint Apparatus, Lithography System, Article Manufacturing Method, and Non-transitory Computer-readable Storage Medium
CANON KABUSHIKI KAISHA
0 cites