Patents/Inventors

Shinichiro Kawakami

Koshi CityJP5 patents

5 Patents

US125720772026
Heat Treatment Apparatus and Heat Treatment Method
Tokyo Electron Limited
0 cites
US124761102025
Substrate Processing Module
TOKYO ELECTRON LIMITED
0 cites
US122986682025
Heat Treatment Apparatus and Heat Treatment Method
Tokyo Electron Limited
0 cites
US120026762024
Method for Forming Mask Pattern, Storage Medium, and Apparatus for Processing Substrate
TOKYO ELECTRON LIMITED
0 cites
US116044152023
Substrate Processing Method, Substrate Processing Apparatus, and Computer Readable Recording Medium
TOKYO ELECTRON LIMITED
0 cites