Patents/Inventors

Shinichi Egashira

TochigiJP2 patents

3 Patents

US121408782024
Processing System, Processing Method, Measurement Apparatus, Substrate Processing Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US120259242024
Method of Determining Set of Sample Shot Regions, Method of Obtaining Measurement Value, Information Processing Apparatus, Lithography Apparatus, Storage Medium, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US117264122023
Processing System, Processing Method, Measurement Apparatus, Substrate Processing Apparatus and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites