Patents/Inventors

Shingo Togashi

TokyoJP10 patents

11 Patents

US123580962025
Rubber Membrane Having First and Second Hardness for Use in a Polishing Head
EBARA CORPORATION
0 cites
US121836422024
Film-thickness Measuring Method, Method of Detecting Notch Portion, and Polishing Apparatus
EBARA CORPORATION
0 cites
US121285232024
Polishing Apparatus
EBARA CORPORATION
0 cites
US120681892024
Elastic Membrane, Substrate Holding Device, and Polishing Apparatus
EBARA CORPORATION
0 cites
US119581632024
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, and Method for Replacing Elastic Membrane
EBARA CORPORATION
0 cites
USD10218322024
Elastic Membrane
EBARA CORPORATION
0 cites
US117453062023
Polishing Apparatus and Method of Controlling Inclination of Stationary Ring
EBARA CORPORATION
0 cites
US117312352023
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites
USD09890122023
Elastic Membrane
EBARA CORPORATION
0 cites
US116545242023
Method of Detecting Abnormality of a Roller Which Transmits a Local Load to a Retainer Ring, and Polishing Apparatus
EBARA CORPORATION
0 cites
US115481132023
Method and Apparatus for Polishing a Substrate
EBARA CORPORATION
0 cites