Patents/Inventors

Shingo Nohara

ToyamaJP5 patents

5 Patents

US124943632025
Method of Processing Substrate, Method of Manufacturing Semiconductor Device, Recording Medium, and Substrate Processing Apparatus
Kokusai Electric Corporation
0 cites
US124676892025
Furnace Opening Structure, Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device
KOKUSAI ELECTRIC CORPORATION
0 cites
US121958482025
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US120401792024
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites
US116189472023
Method of Cleaning, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites